1a5496404834bc0f7eaa57aaac70af68_副本 研磨头爆炸图 head6-1head8-1head8-5oxhead8-5mhead8-3head12-3head12-5oxhead12-5Mhead12-7oxhead12-7Mhead12-6head12-8 CMP抛光头（研磨头）CMP Polishing Head MM6-1MM8-1MM8-5MM12-3MM12-5MM2-6M12-7MM12-8 压力膜（抛头气囊）Membrane RING6-1RING8-1RING8-5Ring12-3RING12-5STIRING12-5Mring12-7oxRING12-7MRING!12-6OUTERRING12-6INNERRING12-6ERING12-8 保持环（护圈）Retainer Ring
